Hue, FlorentFlorentHueHoudellier, F.F.HoudellierSnoeck, E.E.SnoeckHartmann, J.P.J.P.HartmannDestefanis, V.V.DestefanisBender, HugoHugoBenderClaverie, AlainAlainClaverieHytch, MartinMartinHytch2021-10-172021-10-172008-09https://imec-publications.be/handle/20.500.12860/13900Strain measurements in electronic devices by aberration-corrected HRTEM and dark-field holographyProceedings paper