Impact of UV wavelength and curing time on the properties of spin-coated low-k films

Redzheb, MuradMuradRedzhebPrager, LutzLutzPragerKrishtab, MikhailMikhailKrishtabArmini, SilviaSilviaArminiVanstreels, KrisKrisVanstreelsFranquet, AlexisAlexisFranquetVan Der Voort, PascalPascalVan Der VoortBaklanov, MikhaïlMikhaïlBaklanov2021-10-222021-10-222015https://imec-publications.be/handle/20.500.12860/25809Impact of UV wavelength and curing time on the properties of spin-coated low-k filmsProceedings paperhttp://ieeexplore.ieee.org/xpl/articleDetails.jsp?arnumber=7325641