Selective patterning of amorphous silicon on MoS2 to fabricate transition-metal dichalcogenide heterostructures

Heyne, MarkusMarkusHeyneGoodyear, AndyAndyGoodyearde Marneffe, Jean-FrancoisJean-Francoisde MarneffeCooke, MikeMikeCookeRadu, IulianaIulianaRaduNeyts, Erik C.Erik C.NeytsDe Gendt, StefanStefanDe Gendt2021-10-242021-10-242017https://imec-publications.be/handle/20.500.12860/28507Selective patterning of amorphous silicon on MoS2 to fabricate transition-metal dichalcogenide heterostructuresProceedings paperhttp://phantomsfoundation.com/GRAPHENECONF/2017/Abstracts/Grapheneconf2017_Heyne_Markus_H._386.pdf