Zhao, LarryLarryZhaoBaklanov, MikhaïlMikhaïlBaklanovPantouvaki, MariannaMariannaPantouvakiTokei, ZsoltZsoltTokeiBeyer, GeraldGeraldBeyer2021-10-192021-10-192010https://imec-publications.be/handle/20.500.12860/18423Ultra low-k materials: challenges of scalingProceedings paper