Characterization of the shape and line-edge roughness of polymer gratings with grazing incidence small-angle X-ray scattering and atomic force microscopy

Suh, Hyu SeonHyu SeonSuhChen, XuanxuanXuanxuanChenRincon Delgadillo, PaulinaPaulinaRincon DelgadilloJiang, ZhangZhangJiangStrzalka, JosephJosephStrzalkaWang, JinJinWangChen, WeiWeiChenGronheid, RoelRoelGronheidde Pablo, JuanJuande PabloFerrier, NicolaNicolaFerrierDoxastakis, ManolisManolisDoxastakisNealey, PaulPaulNealey2021-10-232021-10-2320161600-5767https://imec-publications.be/handle/20.500.12860/27362Characterization of the shape and line-edge roughness of polymer gratings with grazing incidence small-angle X-ray scattering and atomic force microscopyJournal articlehttp://scripts.iucr.org/cgi-bin/paper?S1600576716004453