Penaranda, Juan Santo DomingoJuan Santo DomingoPenarandaNisula, MikkoMikkoNisulaVandenbroucke, SofieSofieVandenbrouckeMinjauw, Matthias M.Matthias M.MinjauwLi, JinJinLiWerbrouck, AndreasAndreasWerbrouckKeukelier, JonasJonasKeukelierPitillas Martinez, Andrea I.Andrea I.Pitillas MartinezDendooven, JolienJolienDendoovenDetavernier, ChristopheChristopheDetavernier2022-03-032021-11-022022-03-0320211477-9226WOS:000613897700007https://imec-publications.be/handle/20.500.12860/38134Converting molecular layer deposited alucone films into Al2O3/alucone hybrid multilayers by plasma densificationJournal article10.1039/d0dt03896bWOS:000613897700007MEDLINE:33351866