Mochi, IacopoIacopoMochiTimmermans, MarinaMarinaTimmermansGallagher, EmilyEmilyGallagherMariano, MarinaMarinaMarianoPollentier, IvanIvanPollentierRajendran, RajeevRajeevRajendranHelfenstein, PatrickPatrickHelfensteinFernandez, SaraSaraFernandezKazazis, DimitriosDimitriosKazazisEkinci, YasinYasinEkinci2021-10-272021-10-2720191932-5150https://imec-publications.be/handle/20.500.12860/33598Experimental evaluation of the impact of carbon nanotube EUV pellicles on reticle imagingJournal articlehttps://doi.org/10.1117/1.JMM.18.1.014002