Relation between film thickness and surface doping of MoS2 based field effect transistors

Lockhart de la Rosa, Cesar JavierCesar JavierLockhart de la RosaArutchelvan, GouthamGouthamArutchelvanLeonhardt, AlessandraAlessandraLeonhardtHuyghebaert, CedricCedricHuyghebaertRadu, IulianaIulianaRaduHeyns, MarcMarcHeynsDe Gendt, StefanStefanDe Gendt2021-10-252021-10-2520182166-532Xhttps://imec-publications.be/handle/20.500.12860/31219Relation between film thickness and surface doping of MoS2 based field effect transistorsJournal articlehttp://aip.scitation.org/doi/full/10.1063/1.4996425