Correlation between solvent diffusion, porosity and pore sealing for low k dielectrics

Abell, ThomasThomasAbellShamiryan, DenisDenisShamiryanPatz, MatthiasMatthiasPatzMaex, KarenKarenMaex2021-10-152021-10-152003https://imec-publications.be/handle/20.500.12860/7112Correlation between solvent diffusion, porosity and pore sealing for low k dielectricsOral presentation