Recaman Payo, MariaMariaRecaman PayoPosthuma, NielsNielsPosthumaUruena De Castro, AngelAngelUruena De CastroDebucquoy, MaartenMaartenDebucquoyPoortmans, JefJefPoortmans2021-10-212021-10-212013https://imec-publications.be/handle/20.500.12860/22988Boron doped selective silicon epitaxy: high efficiency and process simplification in IBC cellsProceedings paper