Sioncke, SonjaSonjaSionckeNyns, LauraLauraNynsVais, AbhitoshAbhitoshVaisLin, DennisDennisLinFranco, JacopoJacopoFrancoBai, XueXueBaiEl Kazzi, SalimSalimEl KazziKunert, BernardetteBernardetteKunertPorret, ClémentClémentPorretMaurice, ThibautThibautMauriceHolsteyns, FrankFrankHolsteynsDe Gendt, StefanStefanDe GendtCollaert, NadineNadineCollaertHeyns, MarcMarcHeynsThean, AaronAaronThean2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24538Si cap passivation on InGaAs: a route to reduce oxide traps.Meeting abstract