Van Genechten, DirkDirkVan GenechtenD'Haen, JanJanD'HaenVan Bael, MarliesMarliesVan BaelVan den Rul, HeidiHeidiVan den RulMullens, J.J.MullensVan Poucke, L.C.L.C.Van PouckeD'Olieslaeger, MarcMarcD'Olieslaeger2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9746Microstructural study of aqueous CSD deposited Pb(Zr0.3Ti0.7)O3 (PZT) filmsProceedings paper