Sun, ConglinConglinSunGolshani, NeginNeginGolshaniVerheyen, PeterPeterVerheyenDe Messemaeker, JokeJokeDe MessemaekerVan De Peer, MyriamMyriamVan De PeerBrahim, KamalKamalBrahimMafakheri, ErfanErfanMafakheriHuang, YishuYishuHuangVan Campenhout, JorisJorisVan CampenhoutCatthoor, FranckyFranckyCatthoorLin, DennisDennisLinVan Dorpe, PolPolVan DorpeHaffner, ChristianChristianHaffner2025-06-232024-11-242025-06-2320242159-3930WOS:001355717100006https://imec-publications.be/handle/20.500.12860/44837Plasmonic properties of silicon nitride encapsulated copperJournal article10.1364/OME.524159WOS:001355717100006INTRABAND OPTICAL CONDUCTIVITYDIFFUSION BARRIERCUSURFACERESISTIVITYPERFORMANCEFILMSAG