Mouche, M.J.M.J.MoucheCaymax, MattyMattyCaymaxBender, HugoHugoBenderStorm, WolfgangWolfgangStormVandervorst, WilfriedWilfriedVandervorst2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1366The importance of H-passivation for low-temperature APCVD silicon epitaxyProceedings paper