Shamiryan, DenisDenisShamiryanAbell, ThomasThomasAbellLe, Quoc ToanQuoc ToanLeMaex, KarenKarenMaex2021-10-152021-10-152003-11https://imec-publications.be/handle/20.500.12860/8128Pinhole density measurements of barriers deposited on low-k filmsJournal article