Advanced PECVD SiCOH low-k films with low dielectric constant and/or high Young's modulus

Verdonck, PatrickPatrickVerdonckWang, CongCongWangLe, Quoc ToanQuoc ToanLeSouriau, LaurentLaurentSouriauVanstreels, KrisKrisVanstreelsKrishtab, MikhailMikhailKrishtabBaklanov, MikhaïlMikhaïlBaklanov2021-10-222021-10-2220140167-9317https://imec-publications.be/handle/20.500.12860/24763Advanced PECVD SiCOH low-k films with low dielectric constant and/or high Young's modulusJournal articlehttp://www.sciencedirect.com/science/article/pii/S016793171300659X#