Study of electron traps associated with oxygen superlattices in n-type silicon

Simoen, EddyEddySimoenJayachandran, SuseendranSuseendranJayachandranDelabie, AnneliesAnneliesDelabieCaymax, MattyMattyCaymaxHeyns, MarcMarcHeyns2021-10-242021-10-2420171610-1634https://imec-publications.be/handle/20.500.12860/29441Study of electron traps associated with oxygen superlattices in n-type siliconJournal articlehttp://onlinelibrary.wiley.com/doi/10.1002/pssc.201700136/abstract