Hardy, A.A.HardyVan Elshocht, SvenSvenVan ElshochtVan Bael, MarliesMarliesVan BaelDe Gendt, StefanStefanDe GendtAdelmann, ChristophChristophAdelmannCaymax, MattyMattyCaymaxConard, ThierryThierryConardWitters, ThomasThomasWittersD'Olieslaeger, MarcMarcD'OlieslaegerHeyns, MarcMarcHeynsMullens, J.J.Mullens2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12246New, fast screening of alternative oxide gate dielectrics by aqueous CSDProceedings paper