Puurunen, RiikkaRiikkaPuurunenDelabie, AnneliesAnneliesDelabieVandervorst, WilfriedWilfriedVandervorst2021-10-152021-10-152004https://imec-publications.be/handle/20.500.12860/9475Island growth in atomic layer deposition: a phenomenological modelProceedings paper