De Mesel, KurtKurtDe MeselSys, CarlCarlSysCaekebeke, KristienKristienCaekebekeVerstuyft, StevenStevenVerstuyftDhoedt, BartBartDhoedtMoerman, IngridIngridMoermanVan Daele, PeterPeterVan DaeleBaets, RoelRoelBaets2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2498Wet lateral oxidation of AlGaAs for passive and active guided wave componentsProceedings paper