Modelling step height reduction and local removal rates based on pad-substrate interactions

Grillaert, JoostJoostGrillaertMeuris, MarcMarcMeurisHeylen, NancyNancyHeylenDevriendt, KatiaKatiaDevriendtVrancken, EviEviVranckenHeyns, MarcMarcHeyns2021-09-302021-09-301998https://imec-publications.be/handle/20.500.12860/2598Modelling step height reduction and local removal rates based on pad-substrate interactionsProceedings paper