Improving EUV imaging at tighter pitch using a tuned-ML mask stack

Wood, ObertObertWoodPhilipsen, VickyVickyPhilipsenSoltwisch, VictorVictorSoltwischRaghunathan, SudharSudharRaghunathanVerduijn, ErikErikVerduijnHendrickx, EricEricHendrickxScholze, FrankFrankScholzeMangat, PawitterPawitterMangat2021-10-222021-10-222014https://imec-publications.be/handle/20.500.12860/24832Improving EUV imaging at tighter pitch using a tuned-ML mask stackOral presentation