Contact technology schemes for advanced Ge and III-V CMOS technologies

Claeys, CorCorClaeysFirrincieli, AndreaAndreaFirrincieliMartens, KoenKoenMartensKittl, JorgeJorgeKittlSimoen, EddyEddySimoen2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20477Contact technology schemes for advanced Ge and III-V CMOS technologiesProceedings paper