Kluth, S.M.S.M.KluthAlvarez, C.C.AlvarezTrellenkamp, St.St.TrellenkampMoers, J.J.MoersMantl, S.S.MantlKretz, J.J.KretzVandervorst, WilfriedWilfriedVandervorst2021-10-162021-10-162005https://imec-publications.be/handle/20.500.12860/10705Scanning spreading resistance microscopy of two-dimensional diffusion of boron implanted in free-standing silicon nanostructuresJournal article