Modeling of the mechanical behavior during programming of a non-volatile phase-change memory cell using a coupled electrical-thermal-mechanical finite-element simulator

Gille, ThomasThomasGilleLisoni, JuditJuditLisoniGoux, LudovicLudovicGouxDe Meyer, KristinKristinDe MeyerWouters, DirkDirkWouters2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12200Modeling of the mechanical behavior during programming of a non-volatile phase-change memory cell using a coupled electrical-thermal-mechanical finite-element simulatorProceedings paper