Atom probe tomography on contemporary semiconductor devices: Challenges in data acquisition, quantification and spatial accuracy

Scheerder, JeroenJeroenScheerderFleischmann, ClaudiaClaudiaFleischmannDialameh, MasoudMasoudDialamehMelkonyan, DavitDavitMelkonyanMorris, RichardRichardMorrisVandervorst, WilfriedWilfriedVandervorstvan der Heide, PaulPaulvan der Heide2021-10-272021-10-272019https://imec-publications.be/handle/20.500.12860/33948Atom probe tomography on contemporary semiconductor devices: Challenges in data acquisition, quantification and spatial accuracyOral presentation