Evaluation of plasma damage in patterned low-k structures by near-field scanning probe microwave microscope: effect of plasma ash chemistry

Urbanowicz, AdamAdamUrbanowiczTalanov, VladimirVladimirTalanovPantouvaki, MariannaMariannaPantouvakiStruyf, HerbertHerbertStruyfDe Gendt, StefanStefanDe GendtBaklanov, MikhaïlMikhaïlBaklanov2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16336Evaluation of plasma damage in patterned low-k structures by near-field scanning probe microwave microscope: effect of plasma ash chemistryProceedings paper