Celano, UmbertoUmbertoCelanoParedis, KristofKristofParedisHumphris, AndrewAndrewHumphrisTedaldi, MattMattTedaldiO'Sullivan, Connor LaharnConnor LaharnO'SullivanHole, PatrickPatrickHoleGoulden, JennyJennyGoulden2021-10-312021-10-312021https://imec-publications.be/handle/20.500.12860/36559An innovative probe microscopy solution for measuring conductivity profiles in 3-dimensionsProceedings paperhttps://doi.org/10.1117/12.2583065