Inoue, FumihiroFumihiroInouePhilipsen, HaroldHaroldPhilipsenRadisic, AlexAlexRadisicArmini, SilviaSilviaArminiLeunissen, PeterPeterLeunissenMiyake, HiroshiHiroshiMiyakeArima, RyoheiRyoheiArimaShimizu, TomohiroTomohiroShimizuIto, ToshiakiToshiakiItoSeki, HirofumiHirofumiSekiShinozaki, YukoYukoShinozakiYamamoto, TomohikoTomohikoYamamotoShingubara, ShosoShosoShingubara2021-10-202021-10-202012https://imec-publications.be/handle/20.500.12860/20845Low temperature through-Si via fabrication using electroless depositionProceedings paperhttp://dx.doi.org/10.1109/3DIC.2012.6262984