Scholze, FrankFrankScholzeLaubis, ChristianChristianLaubisPhilipsen, VickyVickyPhilipsenLuong, VuVuLuongEdrisi, ArashArashEdrisiVan de Kruijs, RobbertRobbertVan de Kruijs2021-10-232021-10-232016https://imec-publications.be/handle/20.500.12860/27283Characterization of optical material properties for alternative EUV mask absorber materialsProceedings paper