Understanding improved TANOS retention by material analysis of the SixNy trapping layer

Rothschild, AudeAudeRothschildVan den Bosch, GeertGeertVan den BoschBreuil, LaurentLaurentBreuilCacciato, AntonioAntonioCacciatoDekkers, HaroldHaroldDekkersSleeckx, ErikErikSleeckxConard, ThierryThierryConardBrijs, BertBertBrijsKittl, JorgeJorgeKittl2021-10-172021-10-172008https://imec-publications.be/handle/20.500.12860/14392Understanding improved TANOS retention by material analysis of the SixNy trapping layerProceedings paper