Galvanic corrosion of PN junctions during the dielectric removal with HF for RMG transistors

Pacco, AntoineAntoinePaccoSebaai, FaridFaridSebaaiSuhard, SamuelSamuelSuhardStruyf, HerbertHerbertStruyfDe Gendt, StefanStefanDe GendtVos, RitaRitaVosVeloso, AnabelaAnabelaVelosoMertens, PaulPaulMertens2021-10-192021-10-192011-10https://imec-publications.be/handle/20.500.12860/19530Galvanic corrosion of PN junctions during the dielectric removal with HF for RMG transistorsProceedings paper