Aabdin, ZainulZainulAabdinGhosh, TanmayTanmayGhoshPacco, AntoineAntoinePaccoRaj, SanojSanojRajDo, Hue Thi BichHue Thi BichDoSaidov, KhakimjonKhakimjonSaidovWeei, Tjiu WengTjiu WengWeeiAnand, UtkarshUtkarshAnandKral, PetrPetrKralHolsteyns, FrankFrankHolsteynsBosman, MichelMichelBosmanMirsaidov, UtkurUtkurMirsaidov2023-04-272022-12-032023-04-2720222637-6113WOS:000885513100001https://imec-publications.be/handle/20.500.12860/40815Controlling the Wet-Etch Directionality in Nanostructured SiliconJournal article10.1021/acsaelm.2c00824WOS:000885513100001SINGLE-CRYSTAL SILICONGENERAL FORCE-FIELDIN-SITUKOHFABRICATIONACTIVATIONENERGYCELL