Experimental investigation of optimum gate workfunction for CMOS four-terminal muligate MOSFETs (MUGFETs)

Masahara, MeishokuMeishokuMasaharaSurdeanu, RaduRaduSurdeanuWitters, LiesbethLiesbethWittersDoornbos, GerbenGerbenDoornbosNguyen Hoang, VietVietNguyen HoangVan den Bosch, GeertGeertVan den BoschVrancken, ChristaChristaVranckenJurczak, GosiaGosiaJurczakBiesemans, SergeSergeBiesemans2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12565Experimental investigation of optimum gate workfunction for CMOS four-terminal muligate MOSFETs (MUGFETs)Journal article