Characterization and residue elimination of hot aluminum etching in a transformer coupled plasma etcher

Kopalidis, PeterPeterKopalidisVertommen, JohanJohanVertommenBadenes, GonçalGonçalBadenes2021-09-292021-09-291996https://imec-publications.be/handle/20.500.12860/1308Characterization and residue elimination of hot aluminum etching in a transformer coupled plasma etcherJournal article