Li, YunlongYunlongLiCiofi, IvanIvanCiofiCarbonell, LaureLaureCarbonellHeylen, NancyNancyHeylenVan Aelst, JokeJokeVan AelstBaklanov, MikhaïlMikhaïlBaklanovGroeseneken, GuidoGuidoGroesenekenMaex, KarenKarenMaexTokei, ZsoltZsoltTokei2021-10-172021-10-172008-080021-8979https://imec-publications.be/handle/20.500.12860/14029Influence of absorbed water components on SiOCH low-k reliabilityJournal articlehttp://scitation.aip.org/getabs/servlet/GetabsServlet?prog=normal&id=JAPIAU000104000003034113000001&idtype=cvips&gifs=yes