Rudra, SukumarSukumarRudraRoels, JorisJorisRoelsBryce, GeorgeGeorgeBryceSeveri, SimoneSimoneSeveriWitvrouw, AnnAnnWitvrouwBaets, RoelRoelBaetsVan Thourhout, DriesDriesVan Thourhout2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16143Grating light valves: a SiGe based approach towards monolithic integration of MOEMSProceedings paper