Simulations of Wafer-to-Wafer Bonding Dynamics and Deformation Mechanisms

Okudur, Oguzhan OrkutOguzhan OrkutOkudurIacovo, SerenaSerenaIacovoKang, ShuoShuoKangGonzalez, MarioMarioGonzalezBeyne, EricEricBeyne2025-04-162025-02-152025-04-162024979-8-3503-9037-72687-9700WOS:001340802800140https://imec-publications.be/handle/20.500.12860/45205Simulations of Wafer-to-Wafer Bonding Dynamics and Deformation MechanismsProceedings paper10.1109/ESTC60143.2024.10712136979-8-3503-9036-0WOS:001340802800140