Implications of progressive wear-out for lifetime extrapolation of ultra-thin (EOT~1nm) SiON films

Kaczer, BenBenKaczerDegraeve, RobinRobinDegraeveO'Connor, RobertRobertO'ConnorRoussel, PhilippePhilippeRousselGroeseneken, GuidoGuidoGroeseneken2021-10-152021-10-152004-12https://imec-publications.be/handle/20.500.12860/9109Implications of progressive wear-out for lifetime extrapolation of ultra-thin (EOT~1nm) SiON filmsProceedings paper