Lindsay, RichardRichardLindsayLauwers, A.A.Lauwersde Potter de ten Broeck, MurielMurielde Potter de ten BroeckRoelandts, NicoNicoRoelandtsVrancken, ChristaChristaVranckenMaex, KarenKarenMaex2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5447Optimized thermal processing for Ti-Capped CoSi2 for 0.13 μm technologyJournal article