Enhanced mass sensing for nanomechanical resonators with a non-rectangular cross-section

De Vlaminck, IwijnIwijnDe VlaminckDe Greve, KristiaanKristiaanDe GreveNaulaerts, RikRikNaulaertsSivasubramaniam, VenkateshVenkateshSivasubramaniamLagae, LiesbetLiesbetLagaeTilmans, HarrieHarrieTilmansBorghs, GustaafGustaafBorghs2021-10-162021-10-162005-05https://imec-publications.be/handle/20.500.12860/10324Enhanced mass sensing for nanomechanical resonators with a non-rectangular cross-sectionProceedings paper