Novel, effective and cost-efficient method of introducing fluorine into metal/Hf-based gate stack in MuGFET and planar SOI devices with significant BTI improvement

Shickova, AdelinaAdelinaShickovaCollaert, NadineNadineCollaertZimmerman, PaulPaulZimmermanDemand, MarcMarcDemandSimoen, EddyEddySimoenPourtois, GeoffreyGeoffreyPourtoisDe Keersgieter, AnAnDe KeersgieterTrojman, LionelLionelTrojmanFerain, IsabelleIsabelleFerainLeys, FrederikFrederikLeysBoullart, WernerWernerBoullartFranquet, AlexisAlexisFranquetKaczer, BenBenKaczerJurczak, GosiaGosiaJurczakMaes, HermanHermanMaesGroeseneken, GuidoGuidoGroeseneken2021-10-162021-10-162007https://imec-publications.be/handle/20.500.12860/12889Novel, effective and cost-efficient method of introducing fluorine into metal/Hf-based gate stack in MuGFET and planar SOI devices with significant BTI improvementProceedings paper