Impact of O2-based plasma strip chemistries on the electrochemical behavior of TiN electrodes for biomedical applications

Collaert, NadineNadineCollaertMannaert, GeertGeertMannaertParaschiv, VasileVasileParaschivGoossens, DannyDannyGoossensDemand, MarcMarcDemandEberle, WolfgangWolfgangEberle2021-10-202021-10-202012-110167-9317https://imec-publications.be/handle/20.500.12860/20490Impact of O2-based plasma strip chemistries on the electrochemical behavior of TiN electrodes for biomedical applicationsJournal article