Trauwaert, Marie-AstridMarie-AstridTrauwaertVanhellemont, JanJanVanhellemontMaes, HermanHermanMaesVan Bavel, MiekeMiekeVan BavelLangouche, G.G.LangoucheClauws, P.P.Clauws2021-10-012021-10-011998https://imec-publications.be/handle/20.500.12860/2999Low temperature anneal of electron irradiation induced defects in p-type siliconJournal article