ESD nMOSFETs in Advanced Bulk FinFET Technology With Dual S/D Epitaxy

Chen, Wen-ChiehWen-ChiehChenChen, Shih-HungShih-HungChenChiarella, ThomasThomasChiarellaHellings, GeertGeertHellingsLinten, DimitriDimitriLintenGroeseneken, GuidoGuidoGroeseneken2023-08-072023-06-202023-08-0720220018-9383WOS:000830295400001https://imec-publications.be/handle/20.500.12860/41815ESD nMOSFETs in Advanced Bulk FinFET Technology With Dual S/D EpitaxyJournal article10.1109/TED.2022.3190822WOS:000830295400001PERFORMANCEDEVICESDESIGNCLAMP