Monitoring of local and global temperature non-uniformities by means of Therma-Probe and Micro Four-Point Probe metrology

Rosseel, ErikErikRosseelPetersen, DirchDirchPetersenOsterberg, FrederikFrederikOsterbergHansen, OleOleHansenBogdanowicz, JanuszJanuszBogdanowiczClarysse, TrudoTrudoClarysseVandervorst, WilfriedWilfriedVandervorstOrtolland, ClaudeClaudeOrtollandHoffmann, Thomas Y.Thomas Y.HoffmannChan, PhilipPhilipChanSalnik, AlexAlexSalnikNicolaides, LenaLenaNicolaides2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/16140Monitoring of local and global temperature non-uniformities by means of Therma-Probe and Micro Four-Point Probe metrologyProceedings paper