Role of hydrogen in the ordering of the a-Si:H films during and after the film growth. Enhancement of the passivation properties for solar cell application

Bearda, TwanTwanBeardaGougam, AdelAdelGougamKumar, ArulArulKumarO'Sullivan, BarryBarryO'SullivanGranata, StefanoStefanoGranataGordon, IvanIvanGordonPoortmans, JefJefPoortmans2021-10-192021-10-192011https://imec-publications.be/handle/20.500.12860/18537Role of hydrogen in the ordering of the a-Si:H films during and after the film growth. Enhancement of the passivation properties for solar cell applicationProceedings paper