A comprehensive study of channel hot-carrier degradation in short channel MOSFETs with high-k dielectrics

Amat, EsteveEsteveAmatKauerauf, ThomasThomasKaueraufRodríguez, RosanaRosanaRodríguezNafría, MontseMontseNafríaAymerich, XavierXavierAymerichDegraeve, RobinRobinDegraeveGroeseneken, GuidoGuidoGroeseneken2021-10-212021-10-2120130167-9317https://imec-publications.be/handle/20.500.12860/21975A comprehensive study of channel hot-carrier degradation in short channel MOSFETs with high-k dielectricsJournal article