Fabrication of virtual Ge and Ge-rich SiGe substrates using selective or non-selective epitaxial growth

Loo, RogerRogerLooWang, GangGangWangSouriau, LaurentLaurentSouriauHikavyy, AndriyAndriyHikavyyTakeuchi, ShotaroShotaroTakeuchiCaymax, MattyMattyCaymax2021-10-182021-10-182009https://imec-publications.be/handle/20.500.12860/15743Fabrication of virtual Ge and Ge-rich SiGe substrates using selective or non-selective epitaxial growthOral presentation