Comparative study of pore size of low-dielectric-constant porous spin-on-glass films using different methods of nondestructive instrumentation

Kondoh, EiichiEiichiKondohBaklanov, MikhaïlMikhaïlBaklanovLin, E.E.LinGidley, D.D.GidleyNakashima, A.A.Nakashima2021-10-142021-10-142001https://imec-publications.be/handle/20.500.12860/5406Comparative study of pore size of low-dielectric-constant porous spin-on-glass films using different methods of nondestructive instrumentationJournal article